Berenguer, F, Pettinari, G, Felici, M, Balakrishnan, N, Clark, JN, Ravy, S, Patané, A, Polimeni, A and Ciatto, G (2020) Imaging shape and strain in nanoscale engineered semiconductors for photonics by coherent x-ray diffraction. Communications Materials, 1. ISSN 2662-4443

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Coherent x-ray diffractive imaging is a nondestructive technique that extracts three-dimensional electron density and strain maps from materials with nanometer resolution. It has been utilized for materials in a range of applications, and has significant potential for imaging buried nanostructures in functional devices. Here, we show that coherent x-ray diffractive imaging is able to bring new understanding to a lithography-based nanofabrication process for engineering the optical properties of semiconducting GaAs1-yNy on a GaAs substrate. This technique allows us to test the process reliability and the manufactured patterns quality. We demonstrate that regular and sharp geometrical structures can be produced on a few-micron scale, and that the strain distribution is uniform even for highly strained sub-microscopic objects. This nondestructive study would not be possible using conventional microscopy techniques. Our results pave the way for tailoring the optical properties of emitters with nanometric precision for nanophotonics and quantum technology applications.

Item Type: Article
Additional Information: Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit
Uncontrolled Keywords: Imaging techniques; Photonic crystals; Synthesis and processing
Subjects: Q Science > Q Science (General)
Q Science > QA Mathematics > QA75 Electronic computers. Computer science
Divisions: Faculty of Natural Sciences > School of Chemical and Physical Sciences
Depositing User: Symplectic
Date Deposited: 30 Apr 2020 08:58
Last Modified: 09 Jul 2020 08:54

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